2023 - Custom CVD gas diffuser

Designed for project TAČ Trend FW06010019

Tube-based diffuser for CEITEC Plasma CVD systems (Plasma 80, Plasma 100, Plasma 100 Cobra). 1/4" stainless steel tube with uneven-spaced holes (marked by yellow arrows) to ensure homogenous deposition onto 2" sample. Standard Swagelok gas connections are used both inside and outside the reactor as a gas inlet, including 1/4" gas feedthrough.

Tento projekt je financován se státní podporou Technologické agentury ČR a Ministerstva průmyslu a obchodu ČR v rámci Programu TREND.