Lithography (EBL, SPM, FIB)

lab litography

A scanning electron microscope with a lithographic option (Tescan – Vega) are available in our labs. Additionally a dual beam setup with electron (SEM) and focused ion beam (FIB) tools, and 4 nanomanipulators (Tescan Lyra) and Lithographic SEM with precission manipulator (Tescan Mira, sample stage from Raith) are avaiable inthe core facilities of ceitec. Facilities for preparation of resist layes, thir processing and deposition of metals are avaiable in house.