Lithography & Nanopatterning

res litography

Wide range of nanostructures founding their used in our research are prepared via electron beam lithography, focussed ion beam (FIB) lithography and by local focus electron/ion beam induced deposition(FEBID/FIBID). The research in this field concerns mainly the optimization and development of new protocols for FIB and ion and electon beam induced deposition from precursor materials.

Key publications:

  • Nanotechnology, 22 (2011), 10530;. Nanotechnology 21 (2010), 145304.