Automation and control of deposition by IBAD/IBS

The deposition process is computer controlled via software developed in programming environment LabView. Software simultaneously controls several devices which required in order to obtain multilayers with specified parameters. This is achieved via several voltage and current sources, which are responsible for control of two ion sources, flow meter which provides the correct dosage of the working gas, thicknessmeter, two pressure gauges, substrate shutter and drives for target exchange. As a part of sources is on a floating potential of hundreds volts, therefore it was necessary to fit the deposition machine with a series of voltage dividers. For the correct position of the shutter and target the machine contains two circuits for reading end position. The first uses optical gates and the second voltage flow measurement in end position.