2018-01
Atomic hydrogen source implemented into SEM
developed within TACR grant no. TJ01000271
The source of atomic hydrogen utilizes tungsten capillary heted by electron bombardment to temperature > 2000 K. The molecuar hydrogen is flown through the capillary and because of the high temperature it is cracked to atomic hydrogen. This is effectively directed through the nozzle out from the source. The source fits to the DN40CF and can be inserted into SEM via an adaptor flange. It could be mounted in either position (even facing down). The required working pressure range does not collide with the microscope vacuum (tested even up to the 9e-3 Pa).
