Calibration sample for magnetic contrast imaging in SEM
Sample comprises three 10 x 10 mm silicon substrates with lithographically defined magnetic multilayers having square (2 um, 4 um, 5 um, 10 um and 20 um) and rectangular (2x4 um, 5x10 um and 10x20 um) shape. Additionally, several structures were irradiated by different energy ions utilizing FIB (Focused Ion Beam).
Kerr imaging of 10xmultilayer is shown below (including derived hysteresis loop) and serves as a calibration measurement with respect to other techniques, e.g. MFM or SE imaging.
