Specimen manipulator
In order to perform laterally more accurate 2D sequential analysis of contaminated areas larger than 2 cm2, a two-axis piezoelectric manipulator was designed and fabricated ind the frame of NCK DP29 project. It was used for more accurate positioning of the measured crystals during the measurement of contamination traces.The manipulator is designed for the TOF SIMS instrument at CEITEC and is UHV compatible. Figure a) and b) are photos of the manipulator. Figures c) and d) are the measured contamination traces of chlorine and sodium on the YAG crystal. The area analyzed here was 25x11 mm2.
