Stick-slip piezoelectric motor

Stick-slip piezomotor is designed for coarse approach of the probe to the sample in a scanning probe microscope previously developed at the IPE. Movement is provided by series of shearplate piezoelectric elements driven by a specially shaped voltage pulse. The principle of movement is based on different friction coefficients on the interface between moving and static part of the motor (ie. stick-slip phenomenon). Precision of movement is defined by a sliding linear guide. The motor is designed for operation in ultra-high vacuum, guide do not require lubrication and only vacuum-compatible materials were used for fabrication. Its size is 46 mm x 30 mm x 11 mm and displacement up to 10 mm.

motor vzorss ver4